Brand: GATAN

Name and Model: Gatan SmartEMIC Electron Beam Induced Current Measurement System

Manufacturer: GATAN Corporation

Distributor: Obotong Co., Ltd

Product Overview:

Product Function Introduction:

The EBIC analysis system can be controlled by real-time software to automatically collect electron beam induced current (EBIC) signals, obtain EBIC image information, and also obtain IV curve information. Ultimately, it can test the PN junction position, width, minority carrier diffusion length, material or device failure point localization, and is widely used in the field of electronic semiconductors.

Product system features:

High performance, ground noise EBIC system for quantitative EBIC measurement. The user-friendly analysis software runs on the DigitalMicrograph software platform.

The SmartEBIC system used for SEM includes:

Computer controlled EBIC amplifier powered by rechargeable batteries

EBIC sample holder (ASH) with adjustable tungsten probe for desktop contact. Equipped with appropriate Gatan adapters, samples can also be loaded through an air lock*

• Interface with SEM sample stage

Link socket and 4 BNC type cable links, low-noise air feedthrough, suitable for EBIC and electron beam current measurement

DigiScan II digital electron beam control system with Fireware technology. It includes two analog inputs that can simultaneously capture images of photographic quality, and can flexibly control pixel intensity, dwell time at each point, scan rotation, etc. For some SEM, it can also communicate the operating parameters of SEM through software.

Digital Micrography software equipped with advanced SmartEBIC application plugins for quantitative measurement, real-time and post-processing analysis of linear contours

Main technical parameters of the product:

SmartEBIC can automatically control the acquisition and quantitative analysis of EBIC signals:

Scanning control system:

1. 1-, 2-, or 4-bit data acquisition provides a large dynamic range

2. Scan resolution from 16 x 1 to 8000 x 8000 pixels

3. Electron beam dwell time, adjustable between 0.5 milliseconds/pixel and 300 milliseconds/pixel

4. Automatically adjust the image display size to make the EBIC experimental process more convenient

*5. Configure a Digi Scan controller with real-time software control for fully automatic acquisition, allowing for quantitative analysis of EBIC signals without the need for additional post-processing,

*6. EBIC image information can be obtained, as well as IV curve information.

Noise control:

1. Specially designed EBIC accessory sample stage

2. Coaxial winding method

3. Reusable lead-acid batteries (15 hours of battery life)

4. The gain of the amplifier can be changed to optimize the signal-to-noise ratio and bandwidth of data acquisition

5. Two optional first-order RC filters, low-pass or high pass filtering

6. Low drift amplification mode

7. Outside of the communication time with the PC, the system's microprocessor will automatically switch to sleep mode

8. Rich image processing tools. Includes sharpening tools, smoothing tools, Fourier transform tools, etc.

9. It can be adapted to lock-in technology (this system does not provide it, and such a configuration system will not perform quantitative analysis on EBIC signals)

track:

Implemented through software. When collecting resolution mode at 12 bits (1.22mV), it is+/-5V.

Automation:

Even under poor amplifier parameter settings, the system can automatically optimize the display size of images, providing more convenient image browsing

Can automatically set the offset/gain of the amplifier

Software:

Process based one-dimensional diffusion length measurement

A wide range of surface scan/line scan analysis tools, including mathematical analysis tools, filtering applications, etc

A wide range of image display options, including the overlay of secondary electronic images and EBIC images

Programming languages can help you write customized software for your own experiments

Main application areas of the product:

Test PN junction position, width, minority carrier diffusion length, metal material

Failure point location of materials or components

Testing the dislocation density of semiconductor materials

IV characteristic testing

Application example:

Application 1: Testing PN junction position, width, and minority carrier diffusion length

Application 2: Failure Point Localization of Materials or Devices

Brand: GATAN

Name and Model: Gatan SmartEMIC Electron Beam Induced Current Measurement System

Manufacturer: GATAN Corporation

Distributor: Obotong Co., Ltd